Sierra SmartTrak 140 Ultra-Low Pressure mass flow meter

Sierra SmartTrak 140 mass flow controller is a hybrid of two innovative Sierra technologies: our award winning SmartTrak® 100 Series with its industry leading SmartTrak Laminar Flow Element (LFE), sensor and digital electronics is combined with our SideTrak® 840 low ΔP valve featuring large flow coefficient (Cv). By combining these two technologies, the SmartTrak 140 boasts the smallest pressure drop in the industry and includes all the features of Sierra’s flagship SmartTrak 100 Series. Dial-A-Gas® Technology allows users to set zero, span, and full scale for 10 different gases independently in the field. A hand-held or instrumentmounted user display/interface called the Pilot Module makes field-adjustments and re-configuration easy.

Sierra SmartTrak 140 Ultra-Low Pressure mass flow meter

Precision gas mass flow control at higher flow rates, typically greater than 300 slpm (nlpm), relies on a large pressure differential (ΔP) across the control valve, especially with the small flow bodies and control valves commonly used in capillary-type thermal mass flow controllers.

In all cases, especially with expensive high purity gases used in the semiconductor industry, maintaining initial pressurization of the gas is critical until it is eventually put to work in the tool. This is where the reduction of functional efficiency and resulting financial losses can occur. The SmartTrak 140 was specifically designed to improve efficiency in these types of applications.

So, when you need premium high performance mass flow control, but require the absolute lowest possible pressure drop, think SmartTrak 140.

Sierra SmartTrak 140 Features

• Control up to 500 slpm (nlpm) with 4.5 psi (310 mBard)
• High accuracy (+/- 1.0 % of full scale)
• Highly repeatable (+/- 0.2% of full scale)
• True linear performance (+/- 1.0% of full scale in 10 standard gases)
• 10 different gases using Dial-A-Gas® Technology
• Precision digital PID valve control; no manual adjustment or tuning required
• Control valve with large flow coefficient (Cv) for precise control at low ΔP
• Patented, inherently linear Laminar Flow Element (LFE)
• Advanced platinum sensor technology
• All 316 stainless steel construction
• Unique Pilot Module (mounted or handheld) lets you view and change critical control functions
• Avoid recalibration by re-zeroing and re-spanning in the field
• Choose from multiple analog or digital signals including: RS-232, RS-485, 4-20 mA, 0-5, 1-5, 0-10 VDC
• Primary standard calibration, NISTtraceable certification
• Digital communications protocols suported
• Modbus
• Profibus DP
• Foundation Fieldbus
• Device Net (pending)
• Add Compod™ for enhanced Modbus networking capability, including relays, totalization, imputs and display

Specifications

• All clean gases, including toxics and corrosives
• High accuracy of +/- 0.5% of full scale available
• Accuracy of +/- 1% of full scale
• Repeatability of +/- 0.2% of full scale
• ΔP of 4.5 psid (310 mBard)
• Control 0-10 sccm to 0-500 slpm (nlpm)
• Pressure to 500 psig (34.5 barg)
• Gas/ambient temperature: 32 to 122°F (0 to 50°C)
• Single-sided 24 VDC power supply
• Response time: 600ms time constant 4 seconds (typical) to within ± 2% of final value (includes settling time); faster or slower available upon request
• Seals: Viton®, Neoprene®, Kalrez®
• 316 stainless-steel construction
• Analog or digital signals included: RS-232, RS-485 (Multi-drop), 0-20, 4-20 mA; 0-5, 1-5, 0-10 VDC
• Digital communications: Foundation Fieldbus, Modbus RTU, and Profibus DP
• CE approved

Reference: sierrainstruments.com

Download Datasheet: Sierra SmartTrak® 140 Ultra-Low Pressure Drop Mass Flow Controller